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首先建立了一种由相同宽度的金属带,Si O2间隔层与Si介质脊构成的导体-夹层-硅基结构(Conductor-Gap-Silicon,CGS)的混合等离子激元波导模型,分析了间隔层的厚度以及波导宽度对模式传输特性的影响,提出了模场面积为0.08μm2与430μm传输距离的设计方案。在此基础上,通过增加数值模型中介质脊的宽度而形成硅基板CGS波导结构。数值分析结果表明:硅基板CGS波导可将模式有效折射率增至2.8,同时传输长度能够延长到1.74 mm。并且模场面积可以进一步压缩到0.025μm2。此外,硅基板CGS波导制作更加简便,并可采用现有COMS制作技术完成,进而具有较大的实用前景。
Firstly, a mixed plasmon waveguide model of conductor-sandwich-silicon (CGS) consisting of the same width of metal strip, Si O2 spacer and Si medium ridge was established. And the effect of waveguide width on the mode transmission characteristics, a design scheme of mode field area of 0.08μm2 and 430μm transmission distance is proposed. On this basis, the CGS waveguide structure of silicon substrate is formed by increasing the width of the dielectric ridge in the numerical model. The numerical results show that the silicon substrate CGS waveguide can increase the mode effective refractive index to 2.8 and the transmission length can be extended to 1.74 mm. And the mode field area can be further compressed to 0.025μm2. In addition, CGS waveguide silicon substrate made more simple and can be used to complete the existing COMS production technology, and then have a greater practical prospect.