基于电吸收调制器的工作原理和等效电路模型对调制器的高频响应特性进行分析,提出了一种采用频率响应扣除法提取有源区本征响应的仿真新方法.该方法能简单地去掉封装网络、夹具及光探测仪器等带来的影响,用该方法得到了待测InGaAs/InAlAs材料电吸收调制器准确的的高频本征响应特性。 Based on the working principle of the electroabsorption modulator and the equivalent circuit model, the high frequency response of the modulator is analyzed, and a new simulation method of extracting the intrinsic response of the active region by using the frequency response subtraction method is proposed. The method can simply Remove the influence of the package network, fixtures and optical detection instruments, and get the accurate high-frequency intrinsic response characteristics of the InGaAs / InAlAs electro-absorption modulator under test.