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本文介绍一种三电极简易结构的俄歇出现电势能谱仪,并介绍电参量对性能的影响。最后应用它来 作出一些材料的俄歇出现电势能谱。
In this paper, a three-electrode simple structure Auger potential electric spectrometer is introduced, and the influence of electric parameters on the performance is introduced. Finally, it is used to make the Auger potential energy spectra of some materials.