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为了克服传统SPM金属探针的易变形、易磨损、使用寿命短等缺点,利用自主开发的电化学腐蚀控制电路,采用电化学腐蚀法制备了碳纤维探针,并研究了制备工艺条件对碳纤维探针形貌的影响。实验结果表明最佳制备工艺条件为:采用高模量的M55J碳纤维,腐蚀起始电压为4V,参考电压为1V,电解液为4mol/L的NaOH溶液。在此工艺条件下制得了尖端曲率半径约为30nm的碳纤维探针,制备的成功率在50%以上。在室温、大气环境条件下,用上述碳纤维探针对高定向裂解石墨表面进行STM扫图,图像呈现清晰的石墨台阶,说明采用电化学腐蚀法制备的碳纤维探针性能稳定,满足SPM使用的要求。
In order to overcome the shortcomings of traditional SPM metal probe, such as easy deformation, easy wear and short service life, the carbon fiber probe was prepared by electrochemical corrosion method using the electrochemical corrosion control circuit developed by ourselves. Effect of needle appearance. The experimental results show that the optimum preparation conditions are as follows: the M55J carbon fiber with high modulus is used, the initial voltage of corrosion is 4V, the reference voltage is 1V and the electrolyte solution is 4mol / L NaOH solution. Under these conditions, a carbon fiber probe with a tip radius of curvature of about 30 nm was prepared, with a success rate of over 50%. At room temperature and atmospheric conditions, STM scanning was performed on the surface of highly oriented pyrolytic graphite with the above-mentioned carbon fiber probe, and the image showed a clear graphite step, indicating that the performance of the carbon fiber probe prepared by the electrochemical etching method is stable and meets the requirements of SPM use .