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微细电火花加工作为一种低成本、高材料选择度的柔性非接触式加工技术,在微加工中具有独特的工艺优势。本文研究分析了利用微细电火花加工技术制造MEMS微结构、微器件的技术关键及其解决思路。
Micro-EDM, as a kind of low-cost, high-material flexibility non-contact machining technology, has unique technological advantages in micro-machining. This paper studies and analyzes the key technology of MEMS micro-structure and micro-device fabrication using micro-EDM and their solutions.