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喷气式Ｚ箍缩等离子体装置可产生较强的脉冲软ｘ射线，利用此ｘ射线进行了初步曝光实验。另外，本文对此装置用于微细加工从理论上进行了初步探讨。
Jet Z-pinch plasma device can produce strong pulsed soft x-ray, using the x-ray preliminary exposure experiments. In addition, in this paper, the device for micro-processing in theory conducted a preliminary study.