【摘 要】
：
The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water vapor.No reliable results have been reported in the range of 10-6g·(m2·d)-1,and there is no standard ultra-
【机 构】
：
State Key Laboratory of Digital Manufacturing Equipment and Technology&School of Mechanical Science
论文部分内容阅读
The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water vapor.No reliable results have been reported in the range of 10-6g·(m2·d)-1,and there is no standard ultra-barrier for calibration.To detect trace amount of water vapor permeation through an ultra-barrier with extremely high sensitivity and a greatly reduced test per-iod,a predictive instrument was developed by integrating permeation models into high-sensitivity mass spectrometry measurement based on dynamic accumulation,detection,and evacuation of the permeant.Detection reliability was ensured by means of calibration using a standard polymer sample.After calibra-tion,the lower detection limit for water vapor permeation is in the range of 10-7g·(m2·d)-1,which sat-isfies the ultra-barrier requirement.Predictive permeation models were developed and evaluated using experimental data so that the steady-state permeation rate can be forecasted from non-steady-state results,thus enabling effective measurement of ultra-barrier permeation within a significantly shorter test period.
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