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分析了EI-5Z型电子束镀膜机膜厚控制的特点。借助试验结果和理论研究,重新设计了更具实用性的调整板,得到了更好的薄膜性能:基片内偏差在±3%范围内,同一批次基片之间偏差在±5%范围内。满足了批量生产的要求。
The characteristics of thickness control of EI-5Z electron beam coating machine are analyzed. With experimental and theoretical studies, a more practical alignment plate was redesigned to achieve better film performance: ± 3% deviation in the substrate and ± 5% deviation in the same batch Inside. Meet the requirements of mass production.