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详细描述了用CF4／CH4混合气体等离子体处理涤纶膜（PET）表面的过程。利用X光电子能谱（XPS）研究处理后PET的表面结构、性质以及处理后样品的浸水行为。结果表明，PET经碳氟等离子体处理后，其表面覆盖上一层具有憎水功能的氟化层，氟化层的结构与碳氟混合气体的组成有关；混合气体等离子体在PET表面形成化学组成均匀、交联结构的处理层；纯CF4等离子体的处理结果则以刻蚀作用为主，处理层的化学组成不均匀，含氟基团主要分布在外表面。处理后的样品浸水实验证明了混合气体的处理层更有利于保持憎水特性。
The process of treating the surface of polyester film with CF4 / CH4 mixed gas plasma is described in detail. X-ray photoelectron spectroscopy (XPS) was used to study the surface structure and properties of the treated PET and the water immersion behavior of the treated samples. The results show that the surface of PET is covered with a fluorinated layer with water repellent function after fluorocarbon plasma treatment. The structure of fluorinated layer is related to the composition of fluorocarbon mixed gas. The mixed gas plasma forms a chemical The treatment results of pure CF4 plasma are mainly etching, the chemical composition of the treatment layer is not uniform, and the fluorine-containing groups are mainly distributed on the outer surface. The treated sample immersion test proves that the mixed gas treatment layer is more conducive to maintain the hydrophobic properties.