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传统的半导体工艺制作微流体系统中微通道,只能对材料进行表面加工.飞秒激光具有极高的峰值功率和超短的脉冲持续时间,能够对材料直接进行三维加工,为高效率、高质量的微通道加工提供了可能.通过研究飞秒激光加工参数,包括激光脉冲能量、扫描速度和偏振态对玻璃微通道的选择性腐蚀比影响规律,发现当激光脉冲能量在2～10μJ变化时,微通道宽度变大,2μl时微通道长宽选择性腐蚀比L/D高于其它脉冲能量参数,但随着腐蚀时间的延长,宽度变化越来越小,最后趋于稳定;当激光扫描速度在0.20～0.45 mm/s之间变化时,随着腐蚀时间的延长微通道长宽选择性腐蚀比L/D逐渐增大,但当速度增加到0.35 mm/s左右时选择性腐蚀比L/D增到最大,此后呈现下降趋势,同样随着腐蚀时间的延长,腐蚀通道的宽度变化越来越小,逐渐趋于平稳;当偏振态从线偏振到圆偏振变化时,线偏振时的微通道长宽选择性腐蚀比L/D更大.实验结果表明:获得较大微通道长宽选择性腐蚀比L/D的最优加工参数为激光脉冲能量2μJ,激光扫描速度0.35 mm/s,线偏振.“,”The traditional semiconductor process makes microchannels in microfluidic systems,the material only can be surface processed.Femtosecond laser has a very high peak power and ultra-short pulse duration,can directly process the material in three-dimensions,providing the possibility of high-efficiency high-quality microchannel processing.By studying the influence of femtosecond laser processing parameters,including laser pulse energy,scanning speed and polarization on the selective corrosion ratio of glass microchannels,it is found that the width of the microchannel increases when the laser pulse energy changes from 2 μJ to 10μJ,the length-width selective corrosion ratio L/D of the microchannel is higher than that of other pulse parameters when the laser pulse energy is 2 μJ,but with the increase of corrosion time,the width change becomes smaller and smaller,and finally becomes stable.When the laser scanning speed varies between 0.20 mm/s and 0.45 mm/s,the L/D selectivity corrosion ratio of the microchannel gradually increases with the increase of the etching time.However,when the velocity increases to 0.35 mm/s,the L/D selective corrosion ratio increases to the maximum and then decreases.Also with the increase of corrosion time,the corrosion channel width changes smaller and smaller,gradually stabilized.When the polarization changes from linear polarization to circular polarization,the microchannel L/D selective corrosion ratio of linear polarization is larger.The experimental results show that the optimal processing parameters of the L/D selective corrosion ratio are laser pulse energy 2 μJ,laser scanning speed 0.35 mm/s,linear polarization.