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介绍了软X射线光栅分束镜Mach-Zehnder干涉等离子体诊断系统调整用双频光栅线条平行度的衍射法测量系统。该系统主要由激光器,准直镜,待测光栅,精密转台(含角度测量仪),直线工作台,光栅调节架和探测器组成。分析了系统中各种误差对测量精度的影响其中包括距离测量误差、波长误差、光栅准直误差即光栅刻线与入射光和反射光组成的平面不垂直、光栅转动过程的误差、光栅表面面型误差、探测器误差,经计算得到系统的绝对误差为minute。计算表明,该系统的测量精度满足软X射线Mach-Zehnder干涉系统对双频调整光栅的性能要求。
A diffractive measuring system for adjusting the parallelism of dual raster lines by the soft X-ray grating splitter Mach-Zehnder interferometric plasma diagnostic system is introduced. The system consists of a laser, collimator, grating to be measured, precision turntable (including angle measuring instrument), linear table, raster adjustment frame and detector. The effects of various errors in the system on the measurement accuracy are analyzed, including distance measurement error, wavelength error, grating alignment error, that is, the grating line is not perpendicular to the plane consisting of incident light and reflected light, the grating rotation process error, Type error, detector error, the absolute error of the system is calculated as minute. The calculation shows that the measurement accuracy of the system meets the performance requirements of the dual-frequency adjusting grating by the soft X-ray Mach-Zehnder interferometer system.