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采用微波等离子体化学气相沉积合成金刚石薄膜,通过优化工艺参数和原位等离子后处理等方法来提高金刚石薄膜的质量和辐射响应灵敏度。制作出三明治结构的辐射剂量计。研究了金刚石薄膜取向性和后处理对X射线辐射响应灵敏度的影响。结果表明:薄膜取向性和后处理对X辐射响应性能有很大影响。提高金刚石薄膜的纯度和取向性是提高X射线响应灵敏度的有效途径。制作的金刚石薄膜辐射剂量计的X射线响应电流与辐射剂量率间有良好的线性关系。在电阻率相近的情况下,[100]取向金刚石薄膜制成的器件X射线响应灵敏度比[111]取向的高,取向度越高,其辐射响应灵敏度也越高。原位氧等离子后处理金刚石薄膜剂量计的X射线响应灵敏度比原位氮、氢等离子后处理的高,薄膜表面金刚石的含量由69.9%提高到93.5%,辐射响应灵敏度较未处理的膜提高1倍以上。
The diamond film was synthesized by microwave plasma chemical vapor deposition. The diamond film quality and radiation response sensitivity were improved by optimizing the process parameters and in-situ plasma post-treatment. Make a sandwich structure of the radiation dosimeter. The influence of diamond film orientation and post-processing on the response of X-ray radiation was studied. The results show that the film orientation and post-treatment have a great influence on the X-ray response. Improving the purity and orientation of diamond films is an effective way to improve the sensitivity of X-ray. The produced diamond thin film radiation dosimeter has a good linear relationship between the X-ray response current and the radiation dose rate. In the case of similar resistivity, the X-ray device with [100] oriented diamond films has a higher sensitivity than the [111] orientation and the higher the orientation, the higher the radiation response sensitivity. The in-situ oxygen plasma post-processing diamond thin film dosimeter’s X-ray response sensitivity is higher than that of in-situ nitrogen and hydrogen plasma post-treatment, the content of diamond on the surface of the thin film is increased from 69.9% to 93.5%, and the radiation response sensitivity is 1 Times more.