对 2 0世纪声学测量静电 (或电容 )传感器的实验和理论的进展作了简短综述。重点放在微加工传感器及其理论建模。本文还讨论了传感器的分类 ,当前发展趋势和应用前景 ,显示了微加工声和超声传感器正将声学测量推进到一个全新的发展阶段。 A brief overview of the experimental and theoretical advances in the acoustical measurement of electrostatic (or capacitive) sensors in the 20th century has been made. Focus on micro-machined sensors and their theoretical modeling. This article also discusses the classification of sensors, current trends and application prospects, shows that micro-processing acoustic and ultrasonic sensors are the acoustic measurement to a new stage of development.