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简要总结了ASX—SM扫描电镜大修的情况,阐述了故障的技术分析及解决措施。经过大修,最终使该设备恢复到生产需要,现已投入生产使用中。
The situation of overhaul of ASX-SM scanning electron microscope is briefly summarized, the technical analysis of the fault and its solution are expounded. After overhaul, the equipment finally returned to production needs, has now been put into production use.