Zinc oxide(ZnO) thin films were deposited onto different substrates — tin-doped indium oxide(ITO)/glass, ITO/polyethylene naphthalate(PEN), ITO/polyethylene terephthalate(PET) — by the radio-frequency(RF) magnetron sputtering method. The effect of various O2/(Ar+O2) gas flow ratios(0, 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) was studied in detail. ZnO layers deposited onto ITO/PEN and ITO/PET substrates exhibited a stronger c-axis preferred orientation along the(0002) direction compared to ZnO deposited onto ITO/glass. The transmittance spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO/glass, ITO/PEN, and ITO/PET substrates were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy(SEM) images of the film surfaces indicated that the grain was uniform. The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis was perpendicular to the film surface. The test results for a fabricated ZnO thin film based energy harvester showed that its output voltage increased with increasing acceleration of external vibration. Zinc oxide (ZnO) thin films were deposited onto different substrates - tin-doped indium oxide (ITO) / glass, ITO / polyethylene naphthalate (PEN), ITO / The effect of various O2 / (Ar + O2) gas flow ratios (0, 0.1, 0.2, 0.3, 0.4, 0.5 and 0.6) was studied in detail. The resolution spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO / glass, ITO / PEN, and ITO / PET The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy (SEM) images of the film surfaces indicated that the grain was uniform. was perpendicular to the film surface. The test results for a fabricated ZnO thin film bas ed energy harvester showed that its output voltage increased with acceleration acceleration of external vibration.