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用射频磁控共溅方法制备了InP-SiO2纳米颗粒镶嵌复合薄膜, 分析了它的结构和形成规律. X射线衍射和Raman谱结果表明, InP纳米颗粒呈多晶结构, 颗粒平均尺寸为3～10 nm. 观察到了InP纳米颗粒Raman峰的红移和宽化现象, 可用声子限域模型给予解释. 光学透射谱表明, 该复合膜的光学吸收边在整个可见光范围可调制, 用量子限域效应解释了光学吸收带边的显著蓝移现象. 对于该体系, 由有效质量近似模型得到的理论值明显大于实验结果. 分析表明, InP纳米颗粒的激子有效质量并非为常数, 而与颗粒半径成反比关系, 这可能是导致理论值与实验值差别的主要原因. 讨论了该复合膜中InP纳米颗粒由直接带隙向间接带隙转变的可能性.
InP-SiO2 nanoparticle inlaid composite films were prepared by radio-frequency magnetron sputtering and their structures and formation regularities were analyzed.X-ray diffraction and Raman spectroscopy results showed that the InP nanoparticles were polycrystalline with an average size of 3 ~ 10 nm.The red shift and broadening of the Raman peak of InP nanoparticles were observed and could be explained by the phonon confinement model.The optical transmission spectrum showed that the optical absorption edge of the composite film was tunable in the whole visible range and the quantum confinement Effect of the optical absorption band edge of the significant blue shift phenomenon for the system, the effective mass approximation model obtained by the theoretical value is significantly greater than the experimental results show that, InP nanoparticle exciton effective mass is not constant, and the particle radius Which may be the main reason that causes the difference between the theoretical value and the experimental value.The possibility of InP nanoparticles in the composite film changing from direct band gap to indirect band gap is discussed.