阴极弧离子镀TiAlSiN涂层摩擦与磨损行为

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采用阴极弧离子镀法在GH4169合金表面制备了TiAlSiN涂层,通过扫描电镜和能谱仪分析了其表面和界面的形貌和能谱,用轮廓仪测试了涂层表面粗糙度.在往复式摩擦磨损试验机上进行了涂层摩擦与磨损实验,通过能谱仪分析了涂层表面磨损后点能谱和面能谱,考察了TiAlSiN涂层的摩擦因数和磨损性能,对其磨损机理进行了讨论.实验结果显示涂层表面组织结构较为致密,表面粗糙度为194.57 nm;涂层主要成分为Ti、Al、Si和N元素,Si原子细化了TiN和AlN晶粒;涂层结合界面发生了化学反应和成分的相互扩散,其结合形式为化学结合;涂层摩擦因数平均值为0.493,磨损形式为磨粒磨损;磨损痕迹面扫描结果表明,磨损后Al和Ti形成的氮化物减少,Si和N原子无明显的减少现象,涂层耐磨性增强主要依赖于Si和N形成的化合物. TiAlSiN coating was prepared on the surface of GH4169 alloy by cathodic arc ion plating method. The morphology and energy spectrum of the surface and interface were analyzed by scanning electron microscopy and energy dispersive spectroscopy, and the surface roughness of coating was tested by profile analyzer. Friction and wear tester was used to test the friction and wear of coating. The energy spectrum and surface energy spectrum of the coating were analyzed by energy dispersive spectrometer. The friction coefficient and wear resistance of TiAlSiN coating were investigated. The wear mechanism was studied The experimental results show that the microstructure of the coating is dense and the surface roughness is 194.57 nm. The main components of the coating are Ti, Al, Si and N elements. The Si atoms refine the TiN and AlN grains. The chemical reaction and the mutual diffusion of the chemical components were observed. The binding forms were chemical combination. The average friction coefficient of the coating was 0.493, and the wear form was abrasive wear. The scanning trace of wear surface showed that the nitride formed by Al and Ti decreased, Si and N atoms no significant reduction phenomenon, increased wear resistance of the coating mainly depends on the formation of Si and N compounds.
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