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本文分析了硅压阻式压力传感器输出特性与硅电阻元件温度之间的关系。据此,提出了用μP对此类传感器进行温度及非线性等误差补偿的有效方法,以保证采用此类传感器的数字压力表在-20～50℃温度范围内误差≤±0.10％FS,在15～25℃范围内误差≤±0.05％FS。 本文还介绍了带μP数字压力表的硬件和软件,从而较好地解决了在较大温度范围内高精度压力测量的课题。
This paper analyzes the relationship between the output characteristics of a silicon piezoresistive pressure sensor and the temperature of the silicon resistance element. Accordingly, an effective method of using μP to compensate the error such as temperature and non-linearity is proposed to ensure that the error of digital pressure gauge with such sensor is ≤ ± 0.10% FS in the range of -20 ~ 50 ℃ The error within 15 ~ 25 ℃ ≤ ± 0.05% FS. This article also describes the hardware and software with a μP digital pressure gauge, which solves the problem of high-precision pressure measurement over a wide temperature range.