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本文介绍了一种双纵模双频激光干涉仪的原理,结构及激光光源采用的热稳频原理。激光源采用热稳频方法,不使用压电晶体也不用线膨胀系数小的材料做谐振腔,无须外加磁场,只使用电真空玻璃制造的普通全内腔式He-Ne激光管。干涉仪成本低,激光管寿命长,并能获得550—650MHz的拍频,使干涉仪具有良好的动态测量性能。本仪器经中国测试技术研究院测定,其偏差小于0.1μm/800mm,稳频精度优于2×10~(-9),频率复现性:1×10~(-8)。
This paper introduces the principle and structure of a dual-mode dual-frequency laser interferometer and the thermal stability principle of the laser source. Laser source using thermal frequency method, do not use the piezoelectric crystal nor linear expansion coefficient of material made of resonant cavity, no external magnetic field, only the use of electric vacuum glass made of the general cavity He-Ne laser. Interferometer low cost, long laser tube life, and can get beat beat 550-650MHz, the interferometer has a good dynamic measurement performance. The instrument measured by the China Institute of Testing Technology, the deviation is less than 0.1μm / 800mm, frequency stability better than 2 × 10 -9, frequency reproducibility: 1 × 10 -8.