增益发生器是化学激光器的关键部件之一。为了提高激光光束的质量和激光器的工作性能,本文从增益发生器的加工工艺出发,简单的介绍了传统工艺及其优势与劣势,在此基础上提出了光化学蚀刻与扩散焊结合的新工艺及其优势。重点总结了光蚀刻工艺效果的影响因素及其解决方案。 Gain generators are one of the key components of chemical lasers. In order to improve the quality of the laser beam and the working performance of the laser, this paper briefly introduces the traditional craft and its advantages and disadvantages from the processing technology of the gain generator. On the basis of this, the new technology combining photochemical etching with diffusion welding is proposed. Its advantage. The factors that affect the effect of photolithography process and their solutions are summarized.