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固体物质种类繁多、分类各异,但就其内部结构而言,可分为结晶体与非结晶体两类。近十多年来,非晶态的研究有长足发展。非晶态硅(a-Si:H)的制备和研究仅约十年历史,多晶硅(poly-Si)的制备、研究和应用历史则长些,而微晶硅(μc-Si:H)的制备和研究只是近几年的事。它们之间的转变和生长机理直接影响其应用前景,目前正处于探索之中。
A wide range of solid substances, different classification, but its internal structure, can be divided into two types of crystals and non-crystalline. In the recent ten years, there has been a great progress in the research of amorphous materials. The history of the research and application of poly-Si has been longer than that of amorphous silicon (a-Si: H) Preparation and research is only a matter of recent years. The transformation and growth mechanism between them have a direct impact on their application prospects and are currently under exploration.