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本文针对粗光栅线位移测量系统的误差来源 ,在大量实验的基础上 ,经过理论分析 ,得出细分误差与本底噪声的线性关系式 ,找到了系统修正误差时的理论依据。同时对系统在细分误差补偿前后作了精度分析。
In this paper, based on a large number of experiments, aiming at the error source of the coarse grating displacement measurement system, the linear relationship between the subdivision error and the background noise is obtained through theoretical analysis, and the theoretical basis of the system correction error is found out. At the same time, the accuracy of the system before and after the subdivision error compensation was analyzed.