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介绍了一种高精度的光电探测器线性测量系统,讨论了线性测量的方法,确定以光束叠加法为线性测量系统的基础。设计了测量系统,以944nm激光器为光源,测量了Si陷阱探测器和InGaAs陷阱探测器的非线性因子。实验结果表明,利用该系统在0.1～200μW的入射光功率范围内。Si陷阱探测器非线性因子平均值小于0.009%,联合不确定度小于3.18%;InGaAs陷阱探测器非线性因子平均值小于0.6%,联合不确定度小于6.87%。实验结果证明该系统可以作为高精度光电探测器线性测量装置。
A high precision linear measurement system of photodetector is introduced. The method of linear measurement is discussed and the basis of linear superposition method is determined. The measurement system was designed and the nonlinear factors of Si trap detector and InGaAs trap detector were measured by using 944nm laser as light source. Experimental results show that the system uses 0.1 ~ 200μW incident light power range. The average nonlinear factor of Si trap detector is less than 0.009% and the joint uncertainty is less than 3.18%. The average nonlinear factor of InGaAs trap detector is less than 0.6% and the joint uncertainty is less than 6.87%. The experimental results show that the system can be used as a linear measuring device for high-precision photodetectors.