论文部分内容阅读
本文列举多方面的应用实例介绍了这类传感器广阔的市场前景和社会需求,分析了制作这类传感器工艺上的困难因素;并以笔者在薄型悬臂梁式传感器结构设计和工艺改进上所取得的结果,证明对这类传感器进行探索和改进的可行性。本文最后提出,要开发薄梁形传感器,并要取得高而稳定可靠的技术性能,必须开展材料研究、精密加工专业和传感器生产厂三方紧密配合和协作。
This article lists a wide range of application examples of this kind of sensor to introduce the broad market prospects and social needs, analysis of the production of such sensors on the difficult factors; and the author in the thin cantilever sensor structure design and process improvement achieved The result proves the feasibility of exploring and improving such sensors. At the end of this paper, it is necessary to develop a thin beam sensor, and to achieve high and stable technical performance, we must carry out material research, precision machining and sensor manufacturers close cooperation and collaboration between the three parties.