美国巴特耳纪念学院哥伦布分部建立了一套超净室设备,可以用来研制技术要求很高的微型元件和器件。这套设备能使公司扩大设计研究、制造和评价微型光学元件、薄膜和机械装置。该设备实际上没有空气粒子或其它杂质,温度和湿度可以严格控制。这样,就可以在高度灵敏材料上或对易受污染损伤的加工进行研究。此设备分为两个主要的工作实验室。第一个实验室是100级的洁净区(在一立方英尺的空气中不超过100个直径大于0.3的物质微粒)。该区有超声清洗、漂清槽、光致抗蚀剂旋转器、光屏蔽对准器、超净炉、活性离 The Barthel Memorial College Columbus Division has developed a clean room facility that can be used to develop technically demanding micro-components and devices. This set of equipment enables companies to expand design and research, manufacturing and evaluation of micro-optical components, films and mechanical devices. The device is virtually free of air particles or other impurities, and temperature and humidity can be tightly controlled. In this way, research can be done on highly sensitive materials or on processes that are vulnerable to contamination. This device is divided into two major work laboratories. The first laboratory is a Class 100 clean area (no more than 100 material particles larger than 0.3 in one cubic foot of air). The area has ultrasonic cleaning, rinse tank, photoresist rotator, light shielding aligner, clean oven, active