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采用射频磁控溅射法制备了用于非致冷红外焦平面阵列的BST((Ba0 .7Sr0 .3)TiO3)铁电薄膜热敏电容器 .介绍了热敏电容器上下电极的选材和制备及铁电薄膜的制备工艺 .根据热敏电容器的电容 -温度曲线 ,分析了热敏电容器的工作原理 .实验结果表明BST铁电薄膜热敏电容器可以工作在室温附近 ,约 2 6℃处
A BST ((Ba0.7Sr0.3) TiO3) ferroelectric thin film thermistor for non-cooled infrared focal plane array was prepared by radio-frequency magnetron sputtering. The selection and preparation of upper and lower electrodes for thermistor and iron Based on the capacitance-temperature curve of the thermistor, the working principle of the thermistor is analyzed.The experimental results show that the BST ferroelectric thin film thermistor can work near room temperature, about 26 ℃