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为有效解决半导体制造业中带并行腔和重入约束的双臂集束型设备调度问题,提出一种以优化搜索为核心的调度方法.首先,引入优化FIFO(first in first out)搜索规则,并以系统总完工时间最小化作为目标,建立带并行腔和重入约束的四加工腔双臂集束型设备调度数学模型.在此基础之上,结合虚拟缓冲模块的概念,提出一种基于机械臂交换策略的优化搜索算法.最后,对所提出的算法进行仿真实验,实验结果表明该算法是可行且有效的.
In order to effectively solve the scheduling problem of dual-arm cluster devices with parallel cavity and reentrant constraints in the semiconductor manufacturing industry, a scheduling method based on optimal search is proposed.Firstly, the first in first out search rule With the goal of minimizing the total system completion time, a mathematic model of quadruple-arm cluster device scheduling with parallel cavity and reentrant constraint was established. Based on this, combined with the concept of virtual buffer module, Exchange strategy optimization search algorithm.Finally, the proposed algorithm is simulated, the experimental results show that the algorithm is feasible and effective.