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To improve the performance and reliability of microelectromechanical system’s devices,it is necessary to understand the effect of friction which exists in the majority of microelectromechanical systems(MEMS)with a large ratio of surface area to their volume.The model of electrostatic tangential force of the shuttle in laterally driven comb microresonator is established based on the rule of energy conservation.The effects of microscale,surface roughness,applied voltage,and micro asperities or dents or boles formed in fabrication are investigated,and the electrostatic resistance between two charged moving plates is analyzed.The analytic results are coincident well with those of ANSYS simulation.It is found that the electrostatic resistance becomes high as the increase of the ratio of the shuttle width to the gap between moving plates and the relative surface roughness or the increment of the applied voltage.
To improve the performance and reliability of microelectromechanical system’s devices, it is necessary to understand the effect of friction which exists in the majority of microelectromechanical systems (MEMS) with a large ratio of surface area to their volume. Model of electrostatic tangential force of the shuttle in laterally driven comb microresonator is established based on the rule of energy conservation. These effects of microscale, surface roughness, applied voltage, and micro asperities or dents or boles formed in fabrication are investigated, and the electrostatic resistance between two charged moving plates is analyzed. analytic results are coincident well with those of ANSYS simulation. It is found that the electrostatic resistance becomes high as the increase of the ratio of the shuttle width to the gap between moving plates and the relative surface roughness or the increment of the applied voltage.