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由中北大学研制的MEMS仿生矢量水听器具有低频、高灵敏度等性能特点,但由于纤毛柱体采用二次集成工艺集成在MEMS微结构上,常出现纤毛二次集成倾斜偏差,而且,该偏差严重影响到矢量水听器两轴输出的一致性,即灵敏度的一致性和指向性的对称性。为此研究了纤毛倾斜偏差对MEMS矢量水听器性能的影响。首先,理论上分析水听器工作原理和二次集成工艺的误差来源。然后,在通过激光显微镜等设备得出二次集成误差的基础上,通过ANSYS有限元分析方法分析得出纤毛的倾斜偏差对水听器的灵敏度影响很大,理论上计算出两个轴灵敏度误差为8.7%。因此,提出了通过优化二次集成工艺,从而减少两轴输出的不一致性。最后,采用矢量水听器校准系统测试改进前和改进后的水听器。结果表明:纤毛二次集成过程的倾斜偏差引起两轴输出的不一致(两轴灵敏度相对误差约为9.0%),改进后的水听器可以显著减小二次集成带来的误差。
The MEMS bionic vector hydrophone developed by the University of North China has such characteristics as low frequency and high sensitivity. However, since the cilia cylinders are integrated into the MEMS micro-structure by the secondary integration process, cilia secondary integration tilt deviation often occurs. Moreover, Deviations seriously affect the consistency of the two-axis output of the vector hydrophone, ie the consistency of the sensitivity and the symmetry of the directivity. For this reason, the influence of ciliary skew deviation on the performance of MEMS vector hydrophone was studied. First of all, theoretically analyze the working principle of hydrophone and the source of the error of secondary integration process. Then, based on the secondary integration error obtained by the laser microscope and other devices, the skew deviation of cilia is greatly influenced by the ANSYS finite element analysis method, and the sensitivity of the two axes is theoretically calculated 8.7%. Therefore, it is proposed to reduce the two-axis output inconsistency by optimizing the secondary integration process. Finally, we use a vector hydrophone calibration system to test the pre-modified and the improved hydrophone. The results show that the inclination deviation of the secondary integration of cilia leads to the inconsistent output of two axes (the relative error of two axes sensitivity is about 9.0%). The improved hydrophone can significantly reduce the error caused by the secondary integration.