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对450型多晶硅型铸锭炉加热系统进行优化,提出了双区加热系统的理论,即对顶部加热器和侧面加热器加热功率分别控制;同时对侧面加热器结构进行优化。利用有限元软件ANSYS对加热系统优化后铸锭生长过程进行数值计算,对优化后硅料熔化过程、硅液内部温度分布、硅锭退火过程及硅锭纵向温度分布进行分析,计算结果显示,优化后硅液等温线较平坦、硅锭退火后温度梯度减小,熔化和退火阶段时间明显缩短,可以降低铸锭生产能耗,提高生产效率。
Based on the optimization of the heating system of 450 polycrystalline silicon ingot furnace, the theory of two-zone heating system was put forward, that is, the heating power of top heater and side heater were separately controlled. At the same time, the side heater structure was optimized. The finite element software ANSYS was used to calculate the ingot growth process after optimization of the heating system. The optimization of the melting process, the internal temperature distribution of silicon liquid, the annealing process of silicon ingot and the longitudinal temperature distribution of silicon ingot were analyzed. After the silicon liquid isotherm is relatively flat, silicon ingot annealing temperature gradient decreases, melting and annealing phase time was significantly reduced, can reduce ingot production energy consumption and improve production efficiency.