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采用脉冲辉光放电等离子体气相沉积法在316不锈钢表面沉积膜层较厚的类金刚石膜层。利用拉曼光谱仪(Raman)、X射线光电子能谱仪(XPS)、傅里叶变换红外光谱仪(FT-IR)、光学显微镜、显微硬度计和摩擦磨损实验机分别对膜层组成和微观结构及机械性能进行了表征。研究发现,通过脉冲辉光放电等离子体气相沉积法,在316不锈钢表面制备的类金刚石膜层光滑致密;Raman分析得到的ID/IG和IT/IG比值分别为0.72和0.22;FT-IR分析可知膜层含有较多的CHx组成的sp3键;摩擦磨损试验得到膜层的摩擦系数低至0.100,XPS分析膜层sp3含量高达60.7%和光学显微镜测量膜层的厚度达到7mm。由此可知沉积类金刚石膜层后,可以显著地改善316不锈钢表面的机械性能。
Pulsed glow discharge plasma CVD was used to deposit a thick DLC layer on the surface of 316 stainless steel. The structure and microstructure of the films were characterized by Raman, XPS, FT-IR, optical microscope, microhardness tester and friction and wear tester respectively. And mechanical properties were characterized. The results showed that diamond-like carbon films prepared on 316 stainless steel were smooth and compact by pulsed glow discharge plasma vapor deposition. The ID / IG and IT / IG ratios obtained by Raman analysis were 0.72 and 0.22, respectively. FT-IR analysis showed The film contains more spx bonds of CHx. The friction coefficient of the film is as low as 0.100, the content of sp3 is 60.7% by XPS and the thickness of the film is 7mm by optical microscope. This shows that after deposition of diamond-like carbon film, 316 stainless steel can significantly improve the mechanical properties of the surface.