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随着微机电系统的发展,器件设计和加工过程中的表征成为一个主要问题。提出了将扫描白光干涉表面轮廓测量方法用于微结构和器件的几何特性检测上。测量系统采用了米劳显微干涉仪,利用压电陶瓷物镜纳米定位器实现垂直方向100μm范围内的精确扫描,并通过傅里叶变换算法获取条纹包络峰的位置,进而得到器件的整体集合尺寸信息,与相移干涉方法相比大大提高了测量范围。通过测量纳米台阶对该系统进行了精度标定,测量重复性在亚纳米量级。最后通过测量微谐振器和微压力传感器的几何尺寸说明了该方法的功能。
With the development of MEMS, the characterization in device design and processing becomes a major issue. The method of measuring the surface profile of scanning white light interference is proposed to detect the geometrical properties of the microstructure and device. The measuring system adopts the Melaleuca Microscope Interferometer. The precise scanning in the vertical direction of 100μm is achieved by using the PZT nanometer positioner, and the position of the stripe envelope peak is obtained by the Fourier transform algorithm to obtain the overall assembly of the device The size information greatly increases the measuring range compared to phase-shift interferometry. The system was calibrated by measuring the nanometer steps, and the repeatability of the system was measured on the subnanometer scale. Finally, the function of the method is illustrated by measuring the geometrical dimensions of the microresonator and the micro-pressure sensor.