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使用Nd:YAG脉冲激光器对硅与玻璃进行激光透射连接实验,研究了工艺参数(功率、速度及离焦量)对熔池几何要素(熔深、熔宽及深宽比)的单因素及交互式影响,分析了激光能量密度对激光透射连接硅与玻璃熔池成形的影响,并量化了激光能量密度与熔池几何要素之间的关系。得到了深宽比与剪切强度的匹配曲线。结果表明,当激光能量密度大于8J/mm2时,深宽比趋于平稳,深宽比达到0.25时,其剪切强度达到最大值,激光能量密度对熔池成形及连接质量有着较为显著的作用。
The Nd: YAG pulsed laser was used to experiment the laser transmission connection between silicon and glass. The single factor and interaction of process parameters (power, velocity and defocus amount) on the geometrical elements (penetration depth, melting width and aspect ratio) The influence of laser energy density on the formation of laser-penetrating silicon and glass melt pool was analyzed, and the relationship between the laser energy density and the geometry of molten pool was quantified. The matching curve between aspect ratio and shear strength was obtained. The results show that when the laser energy density is more than 8J / mm2, the aspect ratio tends to be stable, and when the aspect ratio reaches 0.25, the shear strength reaches the maximum value. The laser energy density has a significant effect on the forming and connection quality of molten pool .