以多聚硅氧烷（ Ｅ４０）为硅源，用溶胶凝胶一步法制备了 Ｘ 光激光靶及惯性约束聚变冷冻靶用超低密度 Ｓｉ Ｏ２ 气凝胶。研究了催化剂、溶剂等对其溶胶凝胶过程的影响。制备出的气凝胶密度为５ ｋｇ·ｍ － ３。用 Ｓ Ｅ Ｍ 、 Ｂ Ｅ Ｔ 等方法对其微结构进行了研究。 X-ray laser target and ultra-low density Si O2 aerogels for inertial confinement fusion cryogenic targets were prepared by one-step sol-gel method using polysiloxane (E40) as the silicon source. The effects of catalyst, solvent and so on on sol-gel process were studied. The density of airgel prepared was 5 kg · m - 3. Their microstructures were studied by S E M and B E T methods.