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利用阴极离子镀法在TiC基金属陶瓷刀具上制备了AlCrN涂层,通过扫描电镜观察了表面形貌,并用原子力显微镜分析了三维表面微观形貌,获得表面粗糙度相关评定参数,同时对高度、层次、粒度、功率谱密度等进行了分析。结果表明,表面粗糙度均方根偏差TiC基体为85.8 nm,AlCrN涂层为175 nm,AlCrN涂层与TiC基体表面相对平整,阴极离子镀对表面粗糙度影响较小;AlCrN涂层表面高度值相对分散,支承系数大;AlCrN涂层平均颗粒直径1432 nm,而TiC基体为1460 nm,根据Hall-Petch关系,AlCrN涂层的显微硬度远远高于TiC基体的显微硬度;AlCrN涂层和TiC基体功率谱分布无规律,材料表面均表现为各向异性。
AlCrN coating was prepared on TiC-based cermet tool by cathodic ion plating. The surface morphology was observed by scanning electron microscopy. The three-dimensional surface morphology was analyzed by atomic force microscopy, and the parameters related to surface roughness were obtained. At the same time, Level, particle size, power spectral density were analyzed. The results show that the root mean square deviation of surface roughness is 85.8 nm for TiC matrix and 175 nm for AlCrN coating. The surface of AlCrN coating and TiC matrix is relatively flat, but the effect of cathodic ion plating on surface roughness is small. The surface height of AlCrN coating AlCrN coating has an average particle diameter of 1432 nm and a TiC matrix of 1460 nm. According to the Hall-Petch relationship, the microhardness of the AlCrN coating is much higher than that of the TiC matrix. The AlCrN coating And TiC matrix power spectrum distribution of irregular, the surface of the material showed anisotropy.