引言在集成电路的研制和生产过程中进行动态检测和失效分析是十分重要的环节,现代生产实践表明只有先进的工艺是不够的,还须在工艺流程中配备必要的检测手段,把检侧结果及时反馈到电路设计及工艺控制中去,保证产品的成品率和可靠性,如图1所示。目前大多数的电性能测试只是对电路的输出信息进行处理,无法直接给出电路内部的工作状态。采用 INTRODUCTION Dynamic detection and failure analysis during the development and production of integrated circuits are very important steps. Modern production practice shows that only advanced technology is not enough, and the necessary testing methods must be provided in the process flow to check the results Timely feedback to the circuit design and process control to ensure the product yield and reliability, as shown in Figure 1. At present, most of the electrical performance tests only process the output information of the circuit, and can not directly give the working status of the circuit. use