围绕锗基InAs量子点激光器,开展了激光器腔面失效及再生的研究。研究并分析了灾变性光学镜面损伤产生的机理及其对激光器腔面的影响,开展了腔面再生研究,发展了一套创新性的腔面再生工艺并实现了失效的锗基InAs量子点激光器的再生。根据锗基InAs量子点激光器材料结构设计腐蚀工艺,通过选择性腐蚀在激光器腔面制备出悬臂结构,采用细针解理使悬臂结构自然解理,获得新的激光器谐振腔面,失效激光器重新工作。对比了激光器失效前和再生后的工作性能,结果表明因灾变性光学镜面损伤而失效的锗基InAs量子点激光器获得全新的谐振腔面,锗基激光器器件性能和失效前相当。 Research on the laser cavity surface failure and regeneration around the germanium-based InAs quantum dot laser. Studied and analyzed the mechanism of the catastrophic optical mirror damage and its influence on the laser cavity surface, studied the cavity surface regeneration, developed an innovative cavity surface regeneration technology and realized the failure of the germanium-based InAs quantum dot laser The regeneration. According to the design of the etching process of germanium-based InAs quantum dot laser material structure, the cantilever structure is prepared by selective etching on the cavity surface of the laser, the cantilever structure is naturally cleaved by the fine needle cleavage, the new laser cavity surface is obtained, . The performance before and after laser failure was compared. The results show that the germanium-based InAs quantum dot laser, which failed due to catastrophic optical damage, has a new resonant cavity surface. The performance of the germanium-based laser is equivalent to that before failure.