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依据白光干涉理论,研制了垂直扫描白光干涉表面三维形貌测量仪。重点对实现垂直扫描运动的工作台进行了分析。所研制的测量系统具有1nm的垂直分辨力,可用于表面粗糙度、台阶、膜厚、球面等三维形貌测量。
According to the theory of white light interference, a vertical scanning white light interference surface three-dimensional topograph was developed. Focus on the realization of vertical scanning motion of the workbench were analyzed. The developed measuring system has a vertical resolution of 1nm and can be used for three-dimensional topography measurement of surface roughness, step, film thickness and spherical surface.