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MEMS微型热管作为一种新型的热管技术,在微电子、光电池、红外探测头和激光二极管等的热控制方面具有很大的应用前景。首先,介绍了MEMS微型热管的特点和基本工作原理,简单回顾了其发展历程。然后,从MEMS微型热管的加工制作方法、通道尺寸和总体结构特点出发,指出了其优势所在。在此基础上,综述了近年来微型槽道热管、微型毛细泵回路、微型回路热管和微型振荡热管等不同类型MEMS微型热管的研究进展。最后,总结了MEMS微型热管的发展趋势和实际应用所面临的挑战,指出降低制作成本、优化工质充注封装工艺、改进测试手段和加强运行机理研究是今后工作的重点。
As a new type of heat pipe technology, MEMS miniature heat pipe has great application prospect in the thermal control of microelectronics, photovoltaic cells, infrared detectors and laser diodes. First of all, introduce the characteristics and basic working principle of MEMS miniature heat pipe, simply review its development history. Then, from the manufacturing method of MEMS miniature heat pipe, the size of the channel and the overall structure characteristics, the advantages are pointed out. On this basis, the research progress of micro-channel heat pipe, micro-capillary pump circuit, micro-circuit heat pipe and micro-oscillation heat pipe in recent years are reviewed. Finally, the development trends of MEMS miniature heat pipes and practical challenges are summarized. It is pointed out that reducing production costs, optimizing the filling process of working fluid, improving test methods and enhancing operation mechanism are the focuses of the future work.