利用溶胶－凝胶法（Ｓｏｌ－ｇｅｌ）制备了单层及双层ＴｉＯ２薄膜材料．分析结果表明所制薄膜主要由非晶ＴｉＯ２纳米颗粒组成．单层及双层ＴｉＯ２与钢球及Ｓｉ３Ｎ４陶瓷球对摩在轻载荷（３Ｎ）下具有良好的减摩与抗磨性能，与钢球对摩时失效循环次数分别为３７６和１８５６，与陶瓷球对摩时失效循环次数分别为２２８０和２３４３．玻璃基片主要发生脆性断裂及严重的磨粒磨损；ＴｉＯ２薄膜则发生塑性变形及轻微磨粒磨损 Single-layer and double-layer TiO2 thin films were prepared by sol-gel method. The analysis results show that the film mainly consists of amorphous TiO2 nanoparticles. The single and double TiO2 and steel balls and Si3N4 ceramic balls have good anti-friction and anti-wear properties under light load (3N). The numbers of failure cycles against steel ball are 376 and 1856 respectively, On the friction failure cycles were 2280 and 2343. Glass substrates mainly suffered brittle fracture and severe abrasive wear; plastic deformation and slight abrasive wear of TiO2 film