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研制了一台增益体积为1.17 L的长脉冲紫外预电离TE CO2激光器。基于Pulser/sustainer技术,设计了独立可控的双高压开关抽运电路。在激光混合气体比CO2∶N2∶He=1∶2.5∶13,总气压30 kPa时,以6 nF的Pulser电容控制100 nF的Sustainer电容,获得稳定的辉光放电,激光比注入能量达1.607 J/(kPa.L),其中,Pulser能量不到全部注入能量的5%。另外,在保持Sustainer总电容100 nF不变的情况下,设计了两种脉冲宽度略有不同的Sustainer电路,均获得了稳定的辉光放电,实验测量了放电电压、放电电流与输出激光脉冲波形,并分析了Sustainer放电的阻抗特点。激光器采用“Z”形折叠腔结构,输出激光脉冲宽度达20μs,电光转换效率超过12.0%,最大脉冲能量为6.5 J。
A long pulse UV pre-ionization TE CO2 laser with a gain of 1.17 L has been developed. Based on Pulser / sustainer technology, an independently controllable dual high voltage switch pumping circuit is designed. When the laser gas mixture ratio CO2: N2: He = 1: 2.5: 13 and the total pressure was 30 kPa, a steady nodule discharge was obtained by controlling the 100 nF Sustainer capacitor with a 6 nF Pulser capacitor. The laser specific energy was 1.607 J /(kPa.L), where Pulser energy is less than 5% of the total injected energy. In addition, two Sustainer circuits with slightly different pulse widths were designed to maintain constant constant capacitance of 100 nA for Sustainer. Both of them achieved stable glow discharge. The discharge voltage, discharge current and output laser pulse waveform , And analyzed the impedance characteristics of Sustainer discharge. The laser adopts “Z” folding cavity structure, the output laser pulse width is 20μs, the electro-optical conversion efficiency is over 12.0% and the maximum pulse energy is 6.5 J.