论文部分内容阅读
本文采用射频磁控溅射方法制备了ＳｍＤｙＦｅＣｏ非晶磁光薄膜。研究了氩气压、溅射功率对ＳｍＤｙＦｅＣｏ薄膜性能的影响。实验表明，反射率随氩气压升高而降低。矫顽力随氩气压升高而逐渐增大，达到一定值时克尔回线反向，随后矫顽力又逐渐减小。高气压下的矫顽力温度特性较低气压下的矫顽力温度特性要好，但氩气压进一步升高，磁光克尔回线矩形度变差。本征磁光克尔角随氩气压升高而增大，到达最大值后又逐渐减小。反射率随溅射功率增加而升高，到达最大值后又逐渐下降。矫顽力随溅射功率增加而逐渐增大，到达最大值后，磁光克尔回线反向，然后矫顽力又逐渐减小。本征磁光克尔角随溅射功率增加而增大，到达最大值后又逐渐减小。为了满足高信噪比，记录信息稳定的磁光记录要求，氩气压选为０．４７～０．７３Ｐａ，溅射功率选为３００Ｗ～３５０Ｗ较佳
In this paper, SmDyFeCo amorphous magnetic films were prepared by RF magnetron sputtering. The effects of argon pressure and sputtering power on the properties of SmDyFeCo films were investigated. Experiments show that the reflectivity decreases with increasing argon pressure. The coercivity increases with the increase of argon pressure, and when a certain value is reached, the Kerr loop reverses, and then the coercivity gradually decreases. Coercive temperature under high pressure Coercivity temperature characteristics of lower pressure under the pressure is better, but the argon pressure further increased, the magneto-optical Kerr loop rectangular shape worsened. The intrinsic magneto-krecular angle increases with the increase of argon pressure and reaches the maximum and then decreases gradually. Reflectance increases with the sputtering power increases, reaching the maximum and then gradually decreased. The coercive force increases with the increase of sputtering power. After reaching the maximum value, the magneto-optical Kerr return line is reversed, and then the coercivity decreases again. The intrinsic magneto-optical Kerr angle increases with the sputtering power and reaches the maximum and then decreases gradually. In order to meet the requirements of high signal-to-noise ratio (SNR) and stable recording of magneto-optical recording information, argon pressure is selected from 0.47 to 0.73Pa and sputtering power is selected from 300W to 350W