论文部分内容阅读
红外武器系统的快速发展,对红外仿真系统提出了更高的要求。微桥电阻阵列作为红外仿真系统的核心器件,其性能的提高对红外仿真系统的发展至关重要。微桥电阻是利用电阻加热微辐射元来产生红外辐射的,根据微桥电阻的工作原理可知,提高微桥电阻阵列单元辐射效率是微桥电阻性能提高的关键技术之一。利用以Al为反射层电阻、空气为中间介质层和TiNx为吸收层电阻组成的谐振腔结构可以明显提高所需波段的红外辐射效率,从而提高微桥电阻的性能。共振吸收结构为微桥电阻阵列的进一步低功耗、大面阵化提供了有效的设计和制作途径。
The rapid development of infrared weapon system, the infrared simulation system put forward higher requirements. As a core device of infrared simulation system, the micro-bridge resistor array is of great importance to the development of infrared simulation system. Micro-bridge resistance is the use of resistance heating micro-radiating element to produce infrared radiation. According to the working principle of micro-bridge resistance, it can be seen that increasing the radiation efficiency of the micro-bridge resistor array unit is one of the key technologies for improving the micro-bridge resistance performance. The resonant cavity structure with Al as the reflection layer resistance, air as the intermediate layer and TiNx as the absorption layer resistance can obviously improve the infrared radiation efficiency of the required wavelength band, so as to improve the performance of the micro-bridge resistance. The resonant absorption structure provides an effective design and fabrication approach for the further low power consumption and large area array resistance of the micro-bridge resistor array.