利用微波波导耦合腔激励ＣＯ２激光器，具有结构简单、放电阈值功率低、易调谐和阻抗匹配的特点。结合低频等效电路对腔的设计作了分析讨论，并给出了气体放电的实验结果。 The use of microwave waveguide coupled cavity excitation CO2 laser has the characteristics of simple structure, low discharge threshold power, easy tuning and impedance matching. Combined with low-frequency equivalent circuit, the cavity design is analyzed and discussed, and the experimental results of gas discharge are given.