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本文主要介绍一种微机械测量子系统 ,它与控制、测试和带有闭合数字控制回路结构的测量仪器相关。它尤其适用于光滑位移量的测量。例如 :象由压力和温度引起的物体变形量 ,或者在监测物体气密性时 ,探测由物体的几何尺寸变化引起的电荷量。它也可用来监测集成模块的防水性。如果再给子系统补充一些额外的触觉传感设备 ,它就可应用于机器人系统中。
This article focuses on a micromechanical measurement subsystem that is related to control, testing, and measurement instruments with a closed digital control loop architecture. It is especially suitable for the measurement of smooth displacement. Examples include the amount of deformation of an object caused by pressure and temperature, or the amount of charge caused by a change in the geometry of the object while monitoring the airtightness of the object. It can also be used to monitor the water resistance of integrated modules. If you give the subsystem to add some additional tactile sensing device, it can be applied to the robot system.