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采用光学和声学方法无损测量ＳＯＩ结构的特性＝［刊，俄］－１９９４，２３（６）．－３９～４５本文研究了采用扫描声学显微方法和随后进行谐波分析的干涉方法无损测量ＳＯＩ结构的特性的可能性，其结论是用这两种方法来发现ＳＯＩ结构的不一致性和不完美性是可能的。作...
Optical and acoustic methods for non-destructive measurement of SOI structure characteristics = [, Russia] -1994,23 (6). -39-45 This paper investigates the possibility of non-destructive measurement of the characteristics of SOI structures using the scanning acoustic microscopy method followed by harmonic analysis and concludes that both of these methods are used to find inconsistencies and imperfections in SOI structures Sex is possible. Make ...