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论迷了超精密加工的重要意义、主要方法、一些关键技术及在机械制造技术中的作用和地位；介绍了一种直线电机直接驱动的新型超精密进给机构的工作原理和基本结构，较好地解决了超精密加工的精确移动和定位问题。
On the important significance of the ultra-precision machining, the main method, some of the key technologies and their role in machinery manufacturing technology and status; introduced a linear motor direct drive of the new ultra-precision feed mechanism working principle and basic structure, compared Good solution to the precise movement and positioning of ultra-precision machining.