【摘 要】
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Ta-doped titanium dioxide films are deposited on fused quartz substrates using the rf magnetron sputtering technique at different substrate temperatures.After p
【机 构】
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School of Physics, Huazhong University of Science and Technology, Wuhan 430074“,”School of Chemistry
论文部分内容阅读
Ta-doped titanium dioxide films are deposited on fused quartz substrates using the rf magnetron sputtering technique at different substrate temperatures.After post-annealing at 550℃ in a vacuum,all the films are crystallized into the polycrystalline anatase TiO2 structure.The effects of substrate temperature from room temperature up to 350℃ on the structure,morphology,and photoelectric properties of Ta-doped titanium dioxide films are analyzed.The average transmittance in the visible region (400-800nm) of all films is more than 73％.The resistivity decreases firstly and then increases moderately with the increasing substrate temperature.The polycrystalline film deposited at 150℃ exhibits a lowest resistivity of 7.7 × 10-4 Ω.cm with the highest carrier density of 1.1 × 1021 cm-3 and the Hall mobility of 7.4cm2 · V-1 S-1.
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