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本文提出了一种新的圆光栅测量系统——自扫描圆光栅数字测量系统。该测量系统由一自扫描光电二极管列阵及粗圆光栅所组成,用被细分的光敏元间距代替光栅姗距作为测量基准,从而可消除光栅栅距刻划误差而带来的测量误差,同时由于粗光栅的应用使系统的抗干扰能力大大提高,因而能解决目前计量圆光栅领域中普遍存在的精度与抗干扰能力及成本的矛盾。实验表明:该系统的测量分辨率较光栅栅距提高上百倍,具有现有计量圆光栅数字测量系统没有的许多优点。
This paper presents a new circular grating measurement system - self-scanning circular grating digital measurement system. The measurement system is composed of a self-scanning photodiode array and a rough circle grating. The sub-section distance between the photosensitive elements is used as the measurement reference instead of the grating length, so that the measurement error caused by the grating pitch offset can be eliminated, At the same time, the application of coarse grating greatly enhances the anti-interference ability of the system, and thus can solve the contradiction between the accuracy and anti-interference ability and cost prevailing in the field of measuring circular gratings. Experiments show that the measurement resolution of this system is more than 100 times higher than that of the grating, which has many advantages that the existing measuring grating does not have.