高电阻率多层纳米颗粒膜软磁特性及微波磁导率

来源 :物理学报 | 被引量 : 0次 | 上传用户：lslandgp1972

【摘要】

：

研究了应用于微波频段的多层纳米颗粒膜的电阻率、软磁特性和微波磁导率.采用多次顺序沉积Co40Fe40B20和SiO2薄层制备了薄膜.在100 kMm均匀面内磁场经过250℃真空退火2 h,制

【作者】

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别少伟江建军马强杜刚袁林邸永江冯则坤何华辉

【机构】

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华中科技大学电子科学与技术系

【出处】

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物理学报

【发表日期】

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2004年期

【关键词】

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纳米颗粒膜电阻率软磁特性微波磁导率

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研究了应用于微波频段的多层纳米颗粒膜的电阻率、软磁特性和微波磁导率.采用多次顺序沉积Co40Fe40B20和SiO2薄层制备了薄膜.在100 kMm均匀面内磁场经过250℃真空退火2 h,制备的Co40Fe40B20/SiO2多层膜具有难轴矫顽力为210 A/m、饱和磁化强度为838.75 kA/m、电阻率为2.06×103μΩcm,而且具有面内单轴各向异性场为2.78kA/m.该薄膜的微波磁导率实部为125并且保持到1.6 GHz,其铁磁共振频率为1.73 GHz;在1-2 GHz范围,薄膜磁导率虚部具有较大值.

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高电阻率多层纳米颗粒膜软磁特性及微波磁导率

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